Room-temperature deposition of thin-film indium tin oxide on micro-fabricated color filters and its application to flat-panel displays
نویسنده
چکیده
Zhiguo Meng H ua jun P eng C huny a W u C hengfeng Q iu K uen K uen L i Ma n W ong H oi S ing K w ok Abstract — Direct deposition of indium tin oxide (ITO) thin film on color filters is of practical use in the fabrication of state-of-the-art flat-panel displays. Room -tem perature dc m agnetron sputtering of thin-film ITO and issues related to the integration of ITO-on-glass panels containing m icro-fabricated color filters and other functional m aterials have been investigated. The resulting polycrystalline ITO exhibited good adhesion to the underlying color filters, as well as good optical transparency and high electrical conductivity. A pplication of this ITO deposition technology to color liq uid-crystal and organic light-em itting diode displays will also presented.
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